User Fees

Super User Fees 1500 / month
Clean Room Access Charges 22/hr (internal user, capped at $88 day);
$56/hr (external user)
Gold Surcharge 44 + $40 / 50nm

 

 

  Internal External
4 Point Probe Manual   5.00 12.5
Anatech SP-100 Plasma System   25.00 62.5
Brewer Spinner   10.00 25
Bruce Oxidation Furnace   30.00 75
Carl Zeiss 1540   75.00 187.5
Carl Zeiss 1540 Cross Beam   140.00 350
Dek-tak 3030/3ST   5.00 12.5
Dek-tak 3030/3ST (Clean Room only)   5.00 12.5
E-beam Evaporater   30.00 75
Electrical Probe Station   15.00 37.5
Electroplating/Lift Off Bench: Bay 3   0.00 0
J.C. Nabity system   5.00 12.5
Laurell Spinner   10.00 25
LC Technologies Glove Box   25.00 62.5
Micro Automation 1006   24.00 60
MIE wire Bonder   20.00 50
Mini Brute Furnace   25.00 62.5
MRC 8667   25.00 62.5
Nanonex NX2000   60.00 150
Nanospec Spectrophotometer   5.00 12.5
Optiphot 200 Fluorescence MicroScope   5.00 12.5
Oxford Plasma Lab System   60.00 150
PANalytical/Philips X'Pert Pro   20.00 50
Parks Scientific XE7 AFM   35.00 87.5
Perkin Elmer 2400   25.00 62.5
PGT Shara   5.00 12.5
Phoenix Contact angle measurement   5.00 12.5
Photo bay   0.00 0
Pre-diffusion Clean Bench: Bay 1   0.00 0
Quintel 4000 Mask Aligner   30.00 75
SCS Parylene Coating   200.00 500
Sputter Coater   10.00 25
Supra 25 SEM   40.00 100
Thermal Evaporater   28.00 70
Tousimus Critical Point Dryer   25.00 62.5
Unaxis PlasmaTherm 790   50.00 125
UV spectrophotometer   30.00 75
Veeco Microtech Ion Mill   50.00 125
Wet Etch Bench: Bay 2   0.00 0
XACTIX e1   20.00 50
Zygo NuView 6000   20.00 50
Zyvex Nanomanipulator   50.00 125

Fab Notices

  • Oxford Plasma Lab System

    The Oxford Plasma Lab system will be down for parts replacement purposes. Updates as to when the equipment will be back online will be posted shortly.

    Read More
  • Thermal Evaporator

    The Thermal Evaporator will be down approximately until December 11th, 2017 for repair of the cryopump. Further updates will be posted on the website.

    Read More

Upcoming Events

Kostas Center News

  • Publications

    1. Congratulations to the members of the Advanced Manufacturing, Energy Storage, and Multifunctional Materials group for publishing "Stable and Aligne

    Read More

Contact Kostas Center

448 Egan Center, 360 Huntington Ave., Boston, Massachusetts 02115 Phone: 617-373-5848
Email: s.somu@neu.edu